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| 论文题目: | Research on frequency bandwidth and phase difference of piezoelectric resonant cantilever based on mass |
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| 作者: | Min Liu，Hui Xia1，Dong Xia，Guoqiang Liu1 |
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| 刊物名称: | Microsystem Technologies |
| 年: | 2021 |
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Research on frequency bandwidth and phase difference of piezoelectric resonant cantilever based on mass