Study on total reflection performance of films grown by atomic layer deposition relevant to X-ray reflective optics
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论文题目: Study on total reflection performance of films grown by atomic layer deposition relevant to X-ray reflective optics
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作者: Li, YL (Li, Yanli); Lu, WE (Lu, Weier); Zhang, XY (Zhang, Xinyue); Kong, XD (Kong, Xiangdong) ; Qu, F (Qu, Fei); Han, L (Han, Li)
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刊物名称: Applied Optics
: 2022
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