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论文题目: | Study on total reflection performance of films grown by atomic layer deposition relevant to X-ray reflective optics |
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作者: | Li, YL (Li, Yanli); Lu, WE (Lu, Weier); Zhang, XY (Zhang, Xinyue); Kong, XD (Kong, Xiangdong) ; Qu, F (Qu, Fei); Han, L (Han, Li) |
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刊物名称: | Applied Optics |
年: | 2022 |
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Study on total reflection performance of films grown by atomic layer deposition relevant to X-ray reflective optics