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| 论文题目: | Fabrication of multilayer Fresnel zone plate for hard X-ray microscopy by atomic layer deposition and focused ion beam milling |
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| 作者: | Yanli Li, Weier Lu, Shanfeng Wang, Qingxi Yuan, Xiangdong Kong, Li Han, Yang Xia |
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| 刊物名称: | Vacuum |
| 年: | 2023 |
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Fabrication of multilayer Fresnel zone plate for hard X-ray microscopy by atomic layer deposition and focused ion beam milling