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| 论文题目: | Real time generation of circular patterns in electron beam lithography |
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| 作者: | Zhengjie Li, Bohua Yin*, Botong Sun, Jingyu Huang, Pengfei Wang, Li Han |
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| 刊物名称: | Nanotechnology and Precision Engineering |
| 年: | 2023 |
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Real time generation of circular patterns in electron beam lithography