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| 论文题目: | Fabrication and characterization of hybrid bulk and surface acoustic wave resonators with Ag/patterned-AlN/Mo/diamond/Si layered structure |
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| 作者: | Bowei Xie, Fazhu Ding , Hongjing Shang, Daxing Huang, Qi Zou, Congmeng Li, Hongwei Gu |
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| 刊物名称: | Diamond & Related Materials |
| 年: | 2023 |
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Fabrication and characterization of hybrid bulk and surface acoustic wave resonators with Ag/patterned-AlN/Mo/diamond/Si layered structure