Improved uniformity of atomic-layer-deposited HfO2 film along the length of glass monocapillary with high length-diameter ratio
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论文题目: Improved uniformity of atomic-layer-deposited HfO2 film along the length of glass monocapillary with high length-diameter ratio
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作者: Yanli Li, Hongchang Wu, Wensi Lv, Xiangdong Kong, Li Han, He Zhang
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刊物名称: Optical Materials
: 2024
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