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| 论文题目: | An imaging measurement system of electron beam spot based on CMOS sensor and error correction |
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| 作者: | Bai, Lingchao ; He, Wei; Yin, Bohua |
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| 刊物名称: | Journal of Optoelectronics and Advanced Materials |
| 年: | 2025 |
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An imaging measurement system of electron beam spot based on CMOS sensor and error correction