| 论文编号: | 0 |
| 第一作者所在部门: | 0 |
| 论文题目: | Study of the Linewidth Measurement with Scanning Electron Microscope Based on Laser Interference principle |
| 论文题目英文: | |
| 作者: | Yin, BH (Yin, Bohua); Chu, MZ (Chu, Mingzhang); Xu, GL (Xu, Guanglu); Li, X (Li, Xue); Liu, JB (Liu, Junbiao); Chen, DX (Chen, Daixie); Han, L (Han, Li); Jiang, C (Jiang, Chao); Cai, XY (Cai, Xiaoyong) |
| 论文出处: | 0 |
| 刊物名称: | 9TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES (AOMATT 2018): MICRO- AND NANO-OPTICS, CATENARY OPTICS, AND SUBWAVELENGTH ELECTROMAGNETICS Proceedings of SPIE |
| 年: | 2019 |
| 卷: | 0 |
| 期: | 0 |
| 页: | 0 |
| 联系作者: | 0 |
| 收录类别: | |
| 影响因子: | 0 |
| 摘要: | 0 |
| 英文摘要: | |
| 外单位作者单位: | 0 |
| 备注: | 0 |
Study of the Linewidth Measurement with Scanning Electron Microscope Based on Laser Interference principle