| 论文编号: | 0 |
| 第一作者所在部门: | 0 |
| 论文题目: | Effect of dielectric and conductive targets on plasma jet behaviour and thin film properties |
| 论文题目英文: | |
| 作者: | Wang, RX (Wang, Ruixue); Xu, H (Xu, Hui); Zhao, Y (Zhao, Yong); Zhu, WD (Zhu, Weidong); Ostrikov, K (Ostrikov, Kostya (Ken)); Shao, T (Shao, Tao) |
| 论文出处: | 0 |
| 刊物名称: | JOURNAL OF PHYSICS D-APPLIED PHYSICS |
| 年: | 2019 |
| 卷: | 0 |
| 期: | 0 |
| 页: | 0 |
| 联系作者: | 0 |
| 收录类别: | |
| 影响因子: | 0 |
| 摘要: | 0 |
| 英文摘要: | |
| 外单位作者单位: | 0 |
| 备注: | 0 |
Effect of dielectric and conductive targets on plasma jet behaviour and thin film properties