| 论文编号: | 0 |
| 第一作者所在部门: | 0 |
| 论文题目: | Synergistic effect of CO2 and PH3 on the properties of n-type nanocrystalline silicon oxide prepared by plasma-enhanced chemical vapor deposition |
| 论文题目英文: | |
| 作者: | You, JC (You, Jiachuan); Zhao, L (Zhao, Lei); Diao, HW (Diao, Hongwei); Wang, WJ (Wang, Wenjing) |
| 论文出处: | 0 |
| 刊物名称: | JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS |
| 年: | 2020 |
| 卷: | 0 |
| 期: | 0 |
| 页: | 0 |
| 联系作者: | 0 |
| 收录类别: | |
| 影响因子: | 0 |
| 摘要: | 0 |
| 英文摘要: | |
| 外单位作者单位: | 0 |
| 备注: | 0 |
Synergistic effect of CO2 and PH3 on the properties of n-type nanocrystalline silicon oxide prepared by plasma-enhanced chemical vapor deposition