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| 论文题目: | High-speed versatile pattern generator for high-resolutionelectron-beam lithography |
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| 作者: | Botong Sun, Chenhui Deng, Bohua Yin, Guanglu Xu, Jingyu Huang, Li Han |
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| 刊物名称: | 9th International Workshop on Advanced Patterning Solutions, 2025, Shenzhen, China |
| 年: | 2025 |
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High-speed versatile pattern generator for high-resolutionelectron-beam lithography