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| 论文题目: | Effective surface passivation on n‑type crystalline silicon of AlOx thin films by thermal atomic layer deposition |
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| 作者: | Shiyu Qu, Xiaojie Jia, Lilan Wen, Xiaotong Li, Ju Su, Xianyang Zhang, Hongwei Diao, Chunlan Zhou, Lei Zhao*, Wenjing Wang |
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| 刊物名称: | Journal of Materials Science: Materials in Electronics |
| 年: | 2025 |
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Effective surface passivation on n‑type crystalline silicon of AlOx thin films by thermal atomic layer deposition